Differences

This shows you the differences between two versions of the page.

Link to this comparison view

Both sides previous revision Previous revision
Next revision
Previous revision
conventions [2020/05/11 03:53]
mcmaster [Table]
conventions [2023/05/04 16:41] (current)
infosecdj [Objective]
Line 7: Line 7:
   * For others, see below   * For others, see below
  
-mcmaster: I've been calling intermediate etchings in more complex processes like s3-7 meaning sample 3, processing step 7This avoids spending too much time trying to classify something that isn't really a purely poly or active+mcmaster: 
 +  * I've been calling intermediate etchings in more complex processes like s3-7 meaning sample 3, processing step 7 
 +  * This avoids spending too much time trying to classify something that isn't really a purely poly or active
  
 Conventions: Conventions:
Line 31: Line 33:
   * st_24c02_mz_ns50xu.jpg: ST Microelectronics (vendor) 24C02 (chip id). Top metal (mz) image taken with NeoSPlan 50x objective   * st_24c02_mz_ns50xu.jpg: ST Microelectronics (vendor) 24C02 (chip id). Top metal (mz) image taken with NeoSPlan 50x objective
   * st_24c02_mz.jpg: Like above, but capture information unknown. It appears to be top metal, so this is added in. Although no objective is given, implied that its brightfield   * st_24c02_mz.jpg: Like above, but capture information unknown. It appears to be top metal, so this is added in. Although no objective is given, implied that its brightfield
 +  * Complex example
 +    * ti_tms32010c-70015_s1-2_mit20x_rom.jpg
 +    * Vendor: Texas Instruments (ti)
 +    * Chip: TMS32010C
 +    * Chip variant: 70015 (in this case the ROM programming)
 +    * s1-2: sample 1, processing step 2. Please list processing steps on wiki page if available
 +    * mit20x: objective used
 +    * rom: a region of interest within the 20x scan
   * wafer example   * wafer example
-    * mos_8564r6-wafer_mz.jpg: a MOS 8564R6 wafer top metal. Main chip +    * mos_8564r6-wafer_mz_die.jpg: a MOS 8564R6 wafer top metal. Main chip 
-    * mos_8564r6-wafer_mz-9079r2_mz.jpg: a MOS 8564R6 wafer top metal, but the test pattern 9079R2+    * mos_8564r6-wafer_mz_9079r2.jpg: a MOS 8564R6 wafer top metal, but the test pattern 9079R2
  
 ===== Technique ===== ===== Technique =====
Line 73: Line 83:
     * mit50xn: Mitutoyo M Plan Apo 50x Near UV     * mit50xn: Mitutoyo M Plan Apo 50x Near UV
     * mit100x: Mitutoyo M Plan Apo 100x     * mit100x: Mitutoyo M Plan Apo 100x
 +    * nikon20x: Nikon M Plan 20x ELWD
     * neo5x: Olympus Neo 5x     * neo5x: Olympus Neo 5x
     * nd5x: Olympus Neo DPlan 5x     * nd5x: Olympus Neo DPlan 5x
     * ns50x: Olympus Neo SPlan 50x     * ns50x: Olympus Neo SPlan 50x
     * ns50xu: Olympus Neo SPlan 50x ultra-long working distance (ULWD)     * ns50xu: Olympus Neo SPlan 50x ultra-long working distance (ULWD)
 +    * ms20x: Olympus MSPlan 20x
     * sz or zoom: Zoom microscope, generally no scale bar provided because magnification varies (unless that particular zoom setting was calibrated during the same imaging session)     * sz or zoom: Zoom microscope, generally no scale bar provided because magnification varies (unless that particular zoom setting was calibrated during the same imaging session)
- 
-Scales 
- 
-^ Scope      ^ Objective  ^ NA  ^ Resolving power (nm)  ^ nm / pix  ^ Notes               ^ 
-| pr0nscope  | mit2x      |     | 5000                  | 3550      |                     | 
-| pr0nscope  | mit5x      |     | 2000                  | 1420      |                     | 
-| pr0nscope  | mit10x         | 1000                  | 710                           | 
-| pr0nscope  | mit20x         | 700                   | 355                           | 
-| pr0nscope  | ns50xu                               | 142?      |                     | 
-| pr0nscope  | nd50x      |                           | 142?      |                     | 
-| pr0nscope  | mit50xn    |     | 700                   | 142                           | 
-| pr0nscope  | mit100x    |     | 400                   | 71        | FIXME: correct NA?  | 
  
 See also See also
 
conventions.1589169209.txt.gz · Last modified: 2020/05/11 03:53 by mcmaster
 
Except where otherwise noted, content on this wiki is licensed under the following license: CC Attribution 4.0 International
Recent changes RSS feed Donate Powered by PHP Valid XHTML 1.0 Valid CSS Driven by DokuWiki