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honeywell_awm2100v [2013/01/29 21:00] azonenberg |
honeywell_awm2100v [2013/01/30 08:44] azonenberg |
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- | {{tag> | + | Moved to [[azonenberg:honeywell:awm2100v]] |
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- | Honeywell AWM2100V mass airflow sensor ([[http://sensing.honeywell.com/ | + | |
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- | Guessing the 9503 is a date code so tagging it as such. | + | |
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- | Blog posts: | + | |
- | * [[http:// | + | |
- | * [[http:// | + | |
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- | ====== Package ====== | + | |
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- | {{: | + | |
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- | {{: | + | |
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- | ====== Board ====== | + | |
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- | Ceramic, looks like Al2O3. Two layers of metalization plus thick-film resistors. Blue dielectric may be glass or polymer, not sure which yet. | + | |
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- | {{: | + | |
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- | ====== Die ====== | + | |
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- | One layer of polysilicon resistor plus one layer of gold metalization. | + | |
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- | Die is <100> oriented as can be seen by the KOH (or similar) etch used to define the cavity under the membrane. | + | |
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- | {{: | + |