honeywell_awm2100v
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#collection/az #vendor/honeywell #type/sensor/airflow #type/mems
Honeywell AWM2100V mass airflow sensor (http://sensing.honeywell.com/product%20page?pr_id=25698)
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Package
Board
Ceramic, looks like Al2O3. Two layers of metalization plus thick-film resistors. Blue dielectric may be glass or polymer, not sure which yet.
Die
One layer of polysilicon resistor plus one layer of gold metalization.
Die is <100> oriented as can be seen by the KOH (or similar) etch used to define the cavity under the membrane.
honeywell_awm2100v.1359004386.txt.gz · Last modified: 2013/01/24 05:13 by azonenberg