A via, also known as a contact, connects two layers together. Staggered via: when connecting through multiple layers sometimes its preferable to not put all of the vias vertical but instead offset them Stacked via: connecting multiple layers together by putting all vias directly on top of each other Pads are not considered vias as they don't connect two layers together in the IC. Through-silicon via (TSV): http://www.ece.ncsu.edu/asic/ece733/2013/docs/3DIC_12_Franzon_tutorial.pdf