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azonenberg:fibnotes [2014/02/28 09:52] – created azonenbergazonenberg:fibnotes [2014/03/27 19:07] (current) azonenberg
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 Current hypothesis: Plasma clean is killing chips, try using flood gun on FEI Versa and not coating. Current hypothesis: Plasma clean is killing chips, try using flood gun on FEI Versa and not coating.
 +
 +====== 3-27-2014 ======
 +
 +Instrument:FEI Versa 3D (MRC)
 +
 +Decapped sample, soldered to board to verify electrical functionality, desoldered.
 +
 +Mounted on sample holder with carbon tape, put more tape on top of leads to ensure good grounding.
 +
 +Loaded in chamber, ran setup as per SOP
 +
 +Initialized both beams, eucentric adjustment. Initial I-beam imaging 10 pA, Focused I-beam at 1 nA on CMP filler. A bit too high, shifted to 300 pA.
 +
 +Initial Pt dep at 10 pA, used 1 uA for pad.
azonenberg/fibnotes.1393581160.txt.gz · Last modified: 2014/02/28 09:52 by azonenberg