azonenberg:fibnotes
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azonenberg:fibnotes [2014/03/27 17:20] – azonenberg | azonenberg:fibnotes [2014/03/27 19:07] (current) – azonenberg | ||
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Current hypothesis: Plasma clean is killing chips, try using flood gun on FEI Versa and not coating. | Current hypothesis: Plasma clean is killing chips, try using flood gun on FEI Versa and not coating. | ||
+ | ====== 3-27-2014 ====== | ||
+ | |||
+ | Instrument: | ||
+ | |||
+ | Decapped sample, soldered to board to verify electrical functionality, | ||
+ | |||
+ | Mounted on sample holder with carbon tape, put more tape on top of leads to ensure good grounding. | ||
+ | |||
+ | Loaded in chamber, ran setup as per SOP | ||
+ | |||
+ | Initialized both beams, eucentric adjustment. Initial I-beam imaging 10 pA, Focused I-beam at 1 nA on CMP filler. A bit too high, shifted to 300 pA. | ||
+ | |||
+ | Initial Pt dep at 10 pA, used 1 uA for pad. |
azonenberg/fibnotes.1395940800.txt.gz · Last modified: 2014/03/27 17:20 by azonenberg