cmos:intro
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- | You should understand [[: | ||
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- | ====== Conceptual ====== | ||
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- | Complimentary metal oxide semiconductor FET (CMOS) technology is based on the idea that you have two types of transistors: | ||
- | * Positively doped transistors that conduct when presented with a low voltage | ||
- | * Negatively doped transistors that conduct when presented with a high voltage | ||
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- | For example, here is a schematic of a basic inverter: | ||
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- | {{: | ||
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- | V+ is at the top and V- at the bottom with input to the left and output on the right. | ||
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- | ====== Basic layout ====== | ||
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- | With the above in mind lets see how one is physically made. This example is an inverter from a standard cell based IC (SecurID). | ||
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- | ===== Active ===== | ||
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- | First here is the active area: | ||
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- | {{: | ||
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- | From a pure logic standpoint one could assume either side was PMOS or NMOS as long as they were consistent. | ||
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- | ===== Poly ===== | ||
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- | Heres the next layer with the poly: | ||
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- | {{: | ||
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- | Now we have formed transistors. | ||
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- | {{gallery>: | ||
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- | Typical poly gate transistor from a typical standard cell based IC. Some of the contact metal can be seen on the bottom but the gate itself is poly. | ||
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- | ===== Metal ===== | ||
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- | This finally connects things together: | ||
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- | {{: | ||
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- | Note that the above photo has two metal layers. | ||
- | * One side of the PMOS transistor to V+ (top right) | ||
- | * One side of the NMOS transistor to V- (top left) | ||
- | * The other side of each together (bottom metal strip) | ||
- | * Both poly gates together to the input contact (middle top metal blob) | ||
- | * The output (between the two transistors) to an output contact (middle bottom blob) | ||
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- | Note the small circles / squares between the metal and poly and active areas. | ||
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- | ====== Early metal gate ====== | ||
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- | While CMOS has seen a recent metal gate comeback, CMOS has traditionally been dominated by poly gates. | ||
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- | {{gallery>: | ||
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- | Above (unknown CD4000 IC) shows a near textbook aluminum gate transistor. | ||
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- | Metal Gate Technology for Advanced CMOS Devices: "early CMOS processes used aluminium gates in the 1970’s. As scaling continued, n + polysilicon was used as a gate electrode instead due to its ability to withstand heat treatments necessary to activate the source and drain dopants." | ||
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- | ====== Contemporary metal gate ====== | ||
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- | Closely associated with high k dielectrics | ||
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- | ====== References ====== | ||
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- | 1970 IGFET patent " | ||
- | * MOSFET patent? | ||
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- | [[http:// | ||
- | * FET patent? | ||
cmos/intro.1451785017.txt.gz · Last modified: 2016/01/03 01:36 by mcmaster