User Tools

Site Tools


delayer:decoration

Differences

This shows you the differences between two versions of the page.

Link to this comparison view

Both sides previous revisionPrevious revision
Next revision
Previous revision
delayer:decoration [2013/01/22 05:38] – external edit 127.0.0.1delayer:decoration [2013/04/07 04:06] (current) – removed mcmaster
Line 1: Line 1:
-Decoration as called by Fredrick Beck is the process of making parts stand out better. 
- 
-====== Copper sulphate ======  
- 
-Copper sulphate will bring out n-diffusion areas of pn junctions when illuminated (FIXME: how strong?). Chemistry is something like: 
- 
-Cu+2 + 2 e-  ======> Cu 
- 
-Si + 4 HF + 2 CuSO4  ======> SiF4 + 2 Cu + 2 H2SO4 
- 
-At higher temperatures, HF etch takes over, so it needs to be done cold. In particular, do not use a hot light source such as a bare halogen lamp. If it goes through a microscope it should be fine as the thermal part should be heavily attenuated / distorted by the time it reaches the sample. 
- 
-====== Periodic Acid Etchant ======  
- 
-Good at showing where doping changes. Strong etch rate dependence on illumination. Room temp: mostly etches highly doped areas, especially p+ with max conc 10**18 atoms / cm**3 Increased illumination favors weaker doping. 
- 
-  * 20-50 seconds 
-  * 50 mL H2O 
-  * 5 g H5IO6 (periodic acid) 
-  * 5 mg KI 
-  * 2 mL 48 % HF 
-  * Must be added in given order 
- 
-====== Permanganate Etchant ======  
- 
-3 mL KMnO4 
- 
-97 mL 48 % HF 
- 
-5.5 um / min on <111> @ 23C 
- 
-====== Bichromate Etchant ======  
- 
-Brings out n doped areas. Use 1:10 diluted Secco etchant. : H2O 
- 
-====== Silicon etchant p ======  
- 
-  * 20 mL acetic acid 
-  * 1 mL 40% HF 
-  * 3 mL 65% HNO3 
-  * 1-3 seconds 
- 
-====== Staining etchant ======  
-  * 12 mL 65 % HNO3 (works without nitric if just exposed to air?) 
-  * 200 mL 48% HF 
-  * 5-10 seconds 
  
delayer/decoration.1358833091.txt.gz · Last modified: 2013/10/20 14:59 (external edit)