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equipment:lapping:type [2014/10/12 18:41] – mcmasterequipment:lapping:type [2015/06/30 16:05] (current) – [Platen] mcmaster
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 +Lapidary machine: more proper name referring to use on rocks.  Tend to be less precise or more like faceting machines
 +
 +Cabbing/faceting machine; instead of arm support has a post with a precise angle adjustment and holder.  This might make a good DIY conversion route
 +
 +
 ====== Setup types ====== ====== Setup types ======
  
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 === Overhead arm === === Overhead arm ===
 +
 +{{alliedhightech:15-2000-gi:multiprep_2014.jpg?300}}
 +
 +Above: Allied High Tech 15-2000-GI [http://www.alliedhightech.com/Equipment/multiprep-polishing-system-8|Source]
  
 A motorized arm is suspended above the platen. A motorized arm is suspended above the platen.
  
-Example: Allied High Tech 5-2000 MultiPrep System+Example: Allied High Tech 15-2000 MultiPrep System 
 + 
 +Advantages 
 + 
 +    * Less force on platen than side arm design 
 +    * Easier to control force? 
 + 
 +Disadvantages 
 + 
 +    * Parts are usually machine/manufacturer specific 
 +    * More limited selection
  
 === Side arm === === Side arm ===
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     * Higher precision?     * Higher precision?
     * Simpler     * Simpler
 +    * Somewhat scalable: larger size generally yields higher precision
  
 Disadvantages Disadvantages
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     * Tend to be larger than overhead arms     * Tend to be larger than overhead arms
     * Larger fixture: larger lapping machine required     * Larger fixture: larger lapping machine required
 +    * Force can be harder to control: typically adjusted by applying weights \\       * Pneumatic versions exist
  
 ===== Perpendicular polshing ===== ===== Perpendicular polshing =====
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     * Fixture drive motor: motor to put a controlled spin on lapping fixture     * Fixture drive motor: motor to put a controlled spin on lapping fixture
     * Slurry pump: recirculates CMP solution after coming off of the platen     * Slurry pump: recirculates CMP solution after coming off of the platen
-    * York support: keeps fixture in place so it doesn't spin off+    * Support arm: turns fixture and keeps in place
     * Slurry reservoir: holds bulk of slurry solution     * Slurry reservoir: holds bulk of slurry solution
     * Slurry filter: filters out contamination so it doesn't scratch the sample     * Slurry filter: filters out contamination so it doesn't scratch the sample
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     * Cast iron     * Cast iron
-    * Diamond+    * Diamond, Al oxide, etc film surface
     * Poromeric pad     * Poromeric pad
  
-However, cast iron and diamond are too abrasive for IC RE and so only polymeric pads are typically used.+Cast iron and diamond is generally too abrasive for IC RE.  Poromeric pads are standard issue and some Al oxides look suitable.
  
-Some machines can take magnetic apds such that one can switch, say, between a diamond and cast iron pad.  As you should really only be using polymeric pads this feature will probably be less useful.+Some machines can take magnetic pads such that one can switch, say, between a diamond and cast iron pad.  If you are only using poromeric pads this feature will probably be less useful but could be if you are using films.
  
-{{gallery>:tutorial:lapping:layers.jpg}} 
- 
-Above: typical stackup seen on JM machine consisting of (top to bottom): 
- 
-    * MTI 8" Poromeric Polishing Pad (PSA) for final polishing - EQ-PP-8PSA-PC 
-    * Two 8" Mater Plate ( Backing Plate ) for PSA Diamond plate, Sand Paper & Polishing Pad - EQ-MBP-8-2 
-    * CrystalMaster 8 master lap 
- 
-The first, the poromeric pad is the most important.  It is essentially a soft pad to move abrasive around without actually scratching the die.  The next forms a smooth surface on which the poromeric pad rests.  Finally, the master lap is the interface to the machine itself and has ridges to keep backing plate in plate. 
- 
-Originally the machine had a steel backed diamond pad directly on the master lap (attached with adhesive, removed with acetone + heatgun).  In this setup the steel backing is much stiffer than the polishing pad and so serves as the backing plate. 
  
 ==== Cast iron ==== ==== Cast iron ====
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 Cast iron lapping plates are typically used with diamond paste to lap optics and metal surfaces smooth.  They don't seem to be appropriate for use on ICs.  I tried using CMP solution on a cast iron lapping plate and it noticeably corroded it within 10 minutes. Cast iron lapping plates are typically used with diamond paste to lap optics and metal surfaces smooth.  They don't seem to be appropriate for use on ICs.  I tried using CMP solution on a cast iron lapping plate and it noticeably corroded it within 10 minutes.
  
-===== York support =====+===== Support arm =====
  
 {{:delayer:lapping:arm2.jpg?300}} {{:delayer:lapping:arm2.jpg?300}}
  
-Above: york support from Logitech lapping machine.  Note the screw on the side to make fine angle adjustments+Above: from Logitech lapping machine.  Note the screw on the side to make fine angle adjustments 
 + 
 +aka: 
 + 
 +    * Logitech: ? 
 +    * MTI: york support 
 +    * South Bay Technology: yoke assembly
  
 Most machines have a stiff support arm with two rollers on it.  This allows the fixture to rotate along with the machine to evenly lap the sample (planetary motion).  They are usually attached to a sturdy post built into the machine Most machines have a stiff support arm with two rollers on it.  This allows the fixture to rotate along with the machine to evenly lap the sample (planetary motion).  They are usually attached to a sturdy post built into the machine
equipment/lapping/type.1413139274.txt.gz · Last modified: 2014/10/12 18:41 by mcmaster