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equipment:lapping:type [2014/10/23 02:56] mcmasterequipment:lapping:type [2015/06/30 16:05] (current) – [Platen] mcmaster
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     * Cast iron     * Cast iron
-    * Diamond+    * Diamond, Al oxide, etc film surface
     * Poromeric pad     * Poromeric pad
  
-However, cast iron and diamond are too abrasive for IC RE and so only polymeric pads are typically used.+Cast iron and diamond is generally too abrasive for IC RE.  Poromeric pads are standard issue and some Al oxides look suitable.
  
-Some machines can take magnetic apds such that one can switch, say, between a diamond and cast iron pad.  As you should really only be using polymeric pads this feature will probably be less useful.+Some machines can take magnetic pads such that one can switch, say, between a diamond and cast iron pad.  If you are only using poromeric pads this feature will probably be less useful but could be if you are using films.
  
-{{gallery>:tutorial:lapping:layers.jpg}} 
- 
-Above: typical stackup seen on JM machine consisting of (top to bottom): 
- 
-    * MTI 8" Poromeric Polishing Pad (PSA) for final polishing - EQ-PP-8PSA-PC 
-    * Two 8" Mater Plate ( Backing Plate ) for PSA Diamond plate, Sand Paper & Polishing Pad - EQ-MBP-8-2 
-    * CrystalMaster 8 master lap 
- 
-The first, the poromeric pad is the most important.  It is essentially a soft pad to move abrasive around without actually scratching the die.  The next forms a smooth surface on which the poromeric pad rests.  Finally, the master lap is the interface to the machine itself and has ridges to keep backing plate in plate. 
- 
-Originally the machine had a steel backed diamond pad directly on the master lap (attached with adhesive, removed with acetone + heatgun).  In this setup the steel backing is much stiffer than the polishing pad and so serves as the backing plate. 
  
 ==== Cast iron ==== ==== Cast iron ====
equipment/lapping/type.1414032973.txt.gz · Last modified: 2014/10/23 02:56 by mcmaster