equipment:rie:start
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| equipment:rie:start [2013/10/26 14:36] – mcmaster | equipment:rie:start [2019/03/05 01:40] (current) – removed mcmaster | ||
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| - | * keywords | ||
| - | * (plasma, rf, hf) (amp, amplifier, generator, etcher) | ||
| - | |||
| - | Desktop machines: | ||
| - | * Diener Zepto: seems to be a lower cost desktop system. | ||
| - | * Type: barrel | ||
| - | * Thierry Zepto Low Pressure Plasma System | ||
| - | * 40 kHz (compare with 13.56 MHz) | ||
| - | * 2 Needle Valves | ||
| - | * Manual Control (compare with automatic) | ||
| - | * Borosilicate Glass Chamber (compare with quartz chamber) | ||
| - | * SPI SUPPLIES Plasma Prep Plasma Etcher Plasma Asher Plasma Cleaner | ||
| - | * Very basic but looks like it should be functional | ||
| - | * Adjustable RF power to 100W | ||
| - | * Has an RF tuning knob...frequency range? | ||
| - | * ANTON PAAR CPA-1 COOL PLASMA ASHER | ||
| - | * Quartz chamber | ||
| - | * Looks like a nice unit | ||
| - | * Intended for biotech composition analysis (" | ||
| - | * Harrick: Looks like an entry level desktop unit | ||
| - | * Electron Microscopy Sciences: EMS 1050 | ||
| - | |||
| - | Table sized machines: | ||
| - | * Nordson MARCH PM-600 Barrel Plasma Etcher: looks to be a nice unit although much larger than some tabletop units | ||
| - | * Plasmatic Systems Plasma-Preen II 862 Plasma Cleaning & Etching System | ||
| - | * Looks like a super industrial kitchen microwave | ||
| - | * Looks like it has some nice features like maybe better gas diffusion ("show head" type) | ||
| - | * Technics PEII A, Table Top Asher/Desum System | ||
| - | * Type: parallel plate | ||
| - | * 11" parallel plate | ||
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| - | |||
| - | Smallish 13.56 MHz RF supplies: | ||
| - | * March Plasmod Plasma Asher/ | ||
| - | * Seren R601 600W RF Generator Plasma Power Supply 9600610003 13.56MHz March | ||
| - | * Nordson MARCH PM-600 Barrel Plasma Etcher | ||
| - | * March Plasma Etcher Component | ||
| - | * Adtec AX-2000III 2000W RF Plasma Generator 13.56MHz | ||
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| - | |||
| - | Medium machines: | ||
| - | * Plasma-Therm Model 70 | ||
| - | * TECHNICS MACRO 8800 | ||
| - | * Axic MultiMode HF-8 | ||
| - | * TECHNICS PLASMA GmbH PVA TEPLA 100-E | ||
| - | * TOK OPMA 1250 | ||
| - | * TOK OPM-1250ALBM | ||
| - | * OptiGlow ACE | ||
| - | * TEPLA AUTOLOAD 300 | ||
| - | * Branson IPC 2000 3000 4000 | ||
| - | |||
| - | Floor model: | ||
| - | * MetroLine / IPC 7102 Barrel Plasma | ||
| - | * Gasonic 2000LL | ||
| - | * Drytek MegaStrip6 | ||
| - | * Matrix 10 Plasma | ||
| - | * Gasonics Aura 1000 (1008) | ||
| - | * Matrix 105 Plasma Asher Descum | ||
| - | |||
| - | ====== Plasmaline ====== | ||
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equipment/rie/start.1382798174.txt.gz · Last modified: 2013/10/26 14:36 by mcmaster