Setup * Pt electrode * Can substitute for something more common for RE purposes? * 5 % HF or 5 % NH4F * Keep 1 - 5 cm between Si and electrode Procedure * Apply positive voltage to Si Notes * Heavier doped areas are removed quicker * No oxidizer required (ie light or HNO3) * Good at emphasizing various Si doping * Much safer than wet chemical alternatives ====== References ====== - http://books.google.com/books?id=9bk3gJeQKBYC&lpg=PA211&ots=7w5HRCwEnF&dq=doping%20etchants&pg=PA211#v=onepage&q=doping%20etchants&f=false