Above: TPH 050

TPH series pumps are ISO and/or KF inlet flanges. TPU series have conflat inlet flanges. I believe all have KF outlet flanges. I thought the second number is supposed to indicate L/S but my TPH 050 plate clearly lists 25 L/s.

Smaller pumps (say < 50 L/s) tend to be passively cooled. Somewhat larger pumps can be air cooled but really large ones I think are only water cooled.

In addition to the inlet and outlet flange, most (all?) of them also have a vent port. This is supposed to help in venting the chamber without venting through the foreline pump which could push contamination into the chamber.

Above: male receptacle used on balzers turbo pumps

“1967 Pfeiffer was acquired by Balzers AG of Liechtenstein. 1996 Pfeiffer Vacuum Technology AG is now an independent Company operating worldwide and the first medium-sized German company…” [Compound semi]

• Compound semi: http://www.compoundsemiconductor.net/csc/company-details.php?cid=8266
• Ideal vacuum products manuals: http://www.pchemlabs.com/manuals.asp
• Pump/controller compatibility chart: http://www.hsdengineering.com/images/pfeiffer_table.pdf
• Rebuild kits
  • http://www.sisweb.com/vacuum/turbo-repair-kits.htm