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Table of Contents
Pumps
Above: TPH 050
TPH series pumps are ISO and/or KF inlet flanges. TPU series have conflat inlet flanges. I believe all have KF outlet flanges. I thought the second number is supposed to indicate L/S but my TPH 050 plate clearly lists 25 L/s.
Smaller pumps (say < 50 L/s) tend to be passively cooled. Somewhat larger pumps can be air cooled but really large ones I think are only water cooled.
In addition to the inlet and outlet flange, most (all?) of them also have a vent port. This is supposed to help in venting the chamber without venting through the foreline pump which could push contamination into the chamber.
Above: male receptacle used on balzers turbo pumps
Pump controllers
Above: front and rear of TCP-121 controller
Many of the controllers can be used with various pumps but mind that the connector wiring can differ despite being the same connectors. Some of the smaller controllers (ex: TCP-015) use a smaller power connector so look carefully when matching cables.
TCP121
Connectors:
- X1 (bottom circular):
- X2 (middle circular):
- X3 (top circular):
- X4 (right):
- X5 (left): turbo pump
System connectors (referenced in schematics but not part of the TCP121 itself):
- X8: circular connector on the turbo pump, goes to X5
Fuses:
| Fuse | Rating | Purpose |
|---|---|---|
| F1 | 2.5A | Drive electronics |
| F2 | 0.2A | Vent valve |
| F3 | 2.5A | Heater |
| F4 | 0.5A | Cooling |
Station controllers
Above:
There are also some accessories that allow monitoring pump coolant, controlling vent valves, and other things.
Cabling
Mains power
Small plug (12 pin)
Above: A left, B right, 1 bottom, 6 top
For TCP-040, TCP-300, & TCP-310 [WIRING: TCP-270]:
| Purpose | Color | Pin |
|---|---|---|
| Ground | green or green-yellow | A6 |
| Neutral | white or brown | A2 |
| Hot | black or blue | B1 |
Large plug (16 pin)
XXX: diagram is a little iffy, probably disassemble to confirm this
Mains to X4 [TCP121 op inst, fig 10]:
| Purpose | Pin |
|---|---|
| Ground | A8 |
| Neutral | A2 |
| Hot | B2 |
| Jumper | A1-B1 |
Controller to pump
TCP120/121 to TPH/TPU 060, 240, 330
X5 (controller) to X8 (pump) [TCP121 op inst, fig 22]:
| Signal | TPU/TPH pump | TCP controller |
|---|---|---|
| S | B8 | |
| V | A8 | |
| P | B7 | |
| N | A7 | |
| F | B6 | |
| L | B1 | |
| H | B4 | |
| M | A6 | |
| J | B3 | |
| K | B2 | |
| G | B5 | |
| R | A1 | |
| E | A1 | |
| T | A2 | |
| D | A2 | |
| U | A3 | |
| C | A3 | |
| B | A4 | |
| A | A5 |
History
“1967 Pfeiffer was acquired by Balzers AG of Liechtenstein. 1996 Pfeiffer Vacuum Technology AG is now an independent Company operating worldwide and the first medium-sized German company…” [Compound semi]
References
- Ideal vacuum products manuals: http://www.pchemlabs.com/manuals.asp
- Pump/controller compatibility chart: http://www.hsdengineering.com/images/pfeiffer_table.pdf
- Rebuild kits
- TCP120/121 Operating Instructions (TCP121 op inst)