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foundry:umc

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Table of Contents

United Microelectronic Corporation (UMC)

Fabs

Processes

  • 28 nm
  • 40 nm
  • 65 nm
  • 90 nm
  • 0.13 um
  • 0.15 um
  • 0.18 um
  • 0.25 um
  • 0.35 um
  • 0.5 um
  • 0.6 um
  • 8“ wafers

180 nm

4-5 metal layers.

Partial design rules and FIB sections at http://siliconexposed.blogspot.com/2014/02/process-overview-umc-180nm-envm.html

Layouts can vary, as does presence or absence of CMP filler between bond pads.

CMP fill pattern table (measured from XC2C32A)

Layer Width Height X pitch (μm) Y pitch (μm) Conditions
M4 3375 6140 3975 6975 Overglass
M4 1875 4875 3915 6870 Bare metal
M3 3000 825 3870 1960 With overglass removed, M4 present
M3 3075 1125 3952 1995 With M3 removed

Devices

foundry/umc.1405539505.txt.gz · Last modified: 2014/07/16 19:38 by azonenberg