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process_tech [2013/06/26 05:24] – mcmaster | process_tech [2013/06/26 05:25] – mcmaster | ||
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====== Typical layer dimensions ====== | ====== Typical layer dimensions ====== | ||
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+ | This section prepared initially to better understand typical layer thickness to understand how to improve wet etching processes and to better understand limitations of lapping. | ||
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===== Bipolar ===== | ===== Bipolar ===== | ||
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===== CMOS ===== | ===== CMOS ===== | ||
- | Samsung KM44C4000J-7 16 Megabit DRAM, Report Number: SCA 9311-300I | + | Samsung KM44C4000J-7 16 Megabit DRAM, Report Number: SCA 9311-300I |
* Die thickness: 0.3 mm | * Die thickness: 0.3 mm | ||
* Die coat: 9.5 um | * Die coat: 9.5 um | ||
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* 0.8 um process | * 0.8 um process | ||
* Intended use: maybe RF ICs | * Intended use: maybe RF ICs | ||
- | * Inter-Metal Dielectric (IMD): 1.1 um | + | * Inter-Metal Dielectric (IMD) thickness: 1.1 um |
* Metal thickness: 2.1 um or 2.1 um | * Metal thickness: 2.1 um or 2.1 um | ||