Differences

This shows you the differences between two versions of the page.

Link to this comparison view

Both sides previous revisionPrevious revision
Next revisionBoth sides next revision
process_tech [2013/06/26 05:24] mcmasterprocess_tech [2013/06/26 05:25] mcmaster
Line 94: Line 94:
  
 ====== Typical layer dimensions ====== ====== Typical layer dimensions ======
 +
 +This section prepared initially to better understand typical layer thickness to understand how to improve wet etching processes and to better understand limitations of lapping.
 +
  
 ===== Bipolar ===== ===== Bipolar =====
Line 103: Line 106:
 ===== CMOS ===== ===== CMOS =====
  
-Samsung KM44C4000J-7 16 Megabit DRAM, Report Number: SCA 9311-300I+Samsung KM44C4000J-7 16 Megabit DRAM, Report Number: SCA 9311-300I vertical dimensions:
   * Die thickness: 0.3 mm   * Die thickness: 0.3 mm
   * Die coat: 9.5 um   * Die coat: 9.5 um
Line 148: Line 151:
   * 0.8 um process   * 0.8 um process
   * Intended use: maybe RF ICs   * Intended use: maybe RF ICs
-  * Inter-Metal Dielectric (IMD): 1.1 um+  * Inter-Metal Dielectric (IMD) thickness: 1.1 um
   * Metal thickness: 2.1 um or 2.1 um   * Metal thickness: 2.1 um or 2.1 um
  
 
process_tech.txt · Last modified: 2015/12/17 22:52 by azonenberg
 
Except where otherwise noted, content on this wiki is licensed under the following license: CC Attribution 4.0 International
Recent changes RSS feed Donate Powered by PHP Valid XHTML 1.0 Valid CSS Driven by DokuWiki