components
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+ | ====== Passivation ====== | ||
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+ | Protects the underlying circuits. Seems to be omitted on rare occasions or more likely at least something that decapsulation chemicals attack. When still on the chip it gives a cloudy feeling and should be removed for best results. Example of damaged passivation showing difference in image quality: | ||
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+ | {{gallery> | ||
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+ | When the passivation is in good condition it can be difficult to discern if its still present. Also called overglass since its often made of SiO2. | ||
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+ | ====== Pads ====== | ||
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+ | {{gallery> | ||
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+ | See [[pad|main article]] | ||
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+ | ====== Straining ====== | ||
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+ | Tensile stress enhances electron mobility and compressive stress enhances hole mobility. [Kaeslin] Can be incorporated with the following: | ||
+ | * Package | ||
+ | * Adding Ge to Si | ||
+ | * Adjacent layers with different lattice spacings | ||
+ | * Intel Core Duo: SiN cap for tensile stress, epitaxial SiGe for compressive stress | ||
+ | * In particular, this might show up on the die | ||
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+ | Does not seem that this is common and is only seen in very high performance ICs. | ||
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+ | ====== Test structures ([[Test structures|main article]]) ====== | ||
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+ | Used for a variety of things including layer alignment and chemical process monitoring | ||
+ | {{gallery> | ||
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+ | ======Layer alignment ======= | ||
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+ | ======Chemicals process monitoring ======= | ||
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+ | ====== Photomask (mask) art ====== | ||
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+ | Any component that makes up the layers on the die. Gets its name since the components are made by shining light through a photomask. Example photomask: | ||
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+ | Actual photomasks only are for a single layer at a time. | ||
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+ | ====== Copyright, chip number, etc ====== | ||
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+ | Manufacturers typically label dies with an internal chip number and often the manufacturer. Often these are all placed together (if present), but not necessarily. | ||
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+ | {{gallery>: | ||
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+ | ====== Via ====== | ||
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+ | Makes up interconnect layers. | ||
+ | {{gallery>: | ||
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+ | Above example shows an L shaped interconnect used to jumper over an area. The vias are the dots on the ends. Vias seem to usually be made of copper. | ||
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+ | [Kaeslin] provides some good information: | ||
+ | -" | ||
+ | -Plugged via: tungsten " | ||
+ | -Fabs usually only accept a single size via | ||
+ | -Stipple contact/ | ||
+ | -" | ||
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+ | ====== Layers ====== | ||
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+ | ====== Metal ====== | ||
+ | Connects transistor pieces together and often other metal layers. Typically aluminium and occasionally copper on upper layers of high performance chips. | ||
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+ | ====== Interconnect ====== | ||
+ | Connections between metal layers and the transistors. Typically made of copper in modern dies, but earlier dies used aluminium. | ||
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+ | ====== Transistor ====== | ||
+ | The active part of the die. Depending on the process technology, these will be formed in various ways. They are the lowest interesting layer. | ||
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+ | ====== Substrate ====== | ||
+ | The majority of the mass of the die. Usually just a large block of silicon. The surface of a CMOS wafer is typically oriented along the <100> direction, many bipolar devices use < | ||
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+ | Generally fairly boring and not much worth noting. | ||
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+ | ====== References ====== | ||
+ | - http:// | ||
+ | - http:// | ||
+ | - " | ||
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