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components [2025/08/04 21:23] (current) – external edit 127.0.0.1
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 +====== Passivation ====== 
 +
 +Protects the underlying circuits. Seems to be omitted on rare occasions or more likely at least something that decapsulation chemicals attack. When still on the chip it gives a cloudy feeling and should be removed for best results. Example of damaged passivation showing difference in image quality:
 +
 +{{gallery>image:torn_passivation.jpg}}
 +
 +When the passivation is in good condition it can be difficult to discern if its still present. Also called overglass since its often made of SiO2.
 +
 +====== Pads ====== 
 +
 +{{gallery>image:bond_pad.jpg}}
 +
 +See [[pad|main article]]
 +
 +====== Straining ====== 
 +
 +Tensile stress enhances electron mobility and compressive stress enhances hole mobility. [Kaeslin] Can be incorporated with the following:
 +  * Package
 +  * Adding Ge to Si
 +  * Adjacent layers with different lattice spacings
 +  * Intel Core Duo: SiN cap for tensile stress, epitaxial SiGe for compressive stress
 +    * In particular, this might show up on the die
 +
 +Does not seem that this is common and is only seen in very high performance ICs.
 +
 +====== Test structures ([[Test structures|main article]]) ====== 
 +
 +Used for a variety of things including layer alignment and chemical process monitoring
 +{{gallery>image:test_patterns.jpg}}
 +
 +======Layer alignment ======= 
 +
 +======Chemicals process monitoring ======= 
 +
 +====== Photomask (mask) art ====== 
 +
 +Any component that makes up the layers on the die. Gets its name since the components are made by shining light through a photomask. Example photomask:
 +
 +Actual photomasks only are for a single layer at a time.
 +
 +====== Copyright, chip number, etc ====== 
 +
 +Manufacturers typically label dies with an internal chip number and often the manufacturer. Often these are all placed together (if present), but not necessarily.
 +
 +{{gallery>:image:mask_copyright.jpg}}
 +
 +====== Via ====== 
 +
 +Makes up interconnect layers. 
 +{{gallery>:image:via.jpg}}
 +
 +Above example shows an L shaped interconnect used to jumper over an area. The vias are the dots on the ends. Vias seem to usually be made of copper.
 +
 +[Kaeslin] provides some good information:
 +-"Historical sink-in via": hole in dielectric is simply deposited in a layer that fills the hole
 +-Plugged via: tungsten "plug" forms the via and goes between two metal layers mostly filled with a dielectric
 +-Fabs usually only accept a single size via
 +-Stipple contact/via: array of vias since often only one size via is allowed
 +-"Electromigration-aware stipple contact/via"?
 +
 +====== Layers ====== 
 +
 +====== Metal ====== 
 +Connects transistor pieces together and often other metal layers. Typically aluminium and occasionally copper on upper layers of high performance chips.
 +
 +====== Interconnect ====== 
 +Connections between metal layers and the transistors. Typically made of copper in modern dies, but earlier dies used aluminium.
 +
 +====== Transistor ====== 
 +The active part of the die. Depending on the process technology, these will be formed in various ways. They are the lowest interesting layer.
 +
 +====== Substrate ====== 
 +The majority of the mass of the die. Usually just a large block of silicon. The surface of a CMOS wafer is typically oriented along the <100> direction, many bipolar devices use <111>. <110> wafers are usually only seen in specialized applications such as MEMS.
 +
 +Generally fairly boring and not much worth noting.
 +
 +====== References ====== 
 +  - http://en.wikipedia.org/wiki/Semiconductor_fabrication#Interconnect
 +  - http://www.mems-exchange.org/users/masks/intro-equipment.html
 +  - "Digital Integrated Circuit Design: From VLSI Design to CMOS Fabrication." Hubert Kaeslin.
 +