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glossary [2012/07/08 14:43] mcmaster created |
glossary [2013/10/20 10:59] (current) |
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| LOCOS: LOCal Oxidation of Silicon. See http://en.wikipedia.org/wiki/LOCOS | LOCOS: LOCal Oxidation of Silicon. See http://en.wikipedia.org/wiki/LOCOS | ||
| - | SOG: Spin On Glass. | + | Spin On Glass (SOG): "...a type of glass that can be applied as a liquid and cured to form a layer of glass having characteristics similar to those of SiO2" (http://www.ee.washington.edu/research/microtech/cam/SOP/PDFfiles/Spin-on%20glass%20SOP.pdf) |
| Stringer: "unwanted residual material remaining in crevices or along edges of previous layers" (http://www.acceleratedanalysis.com/stringers.html) | Stringer: "unwanted residual material remaining in crevices or along edges of previous layers" (http://www.acceleratedanalysis.com/stringers.html) | ||