Uses piezoelectric static/dynamic friction motors. The New Focus 8095 would probably be my choice for fine positioning, roll, pitch, and z in particular. These stages are low profile, very stable, and very precise. Some disadvantages are that they have relatively short lives compared to conventional motors and that they might be more expensive due to more limited availability compared to more conventional motors.

Yaw might be usable depending on how much correction is needed. I imagine X/Y would be too slow and high precision for scanning.

Somewhat large DC actuator. I got a few for $35 each.

Makes some actuators that look to be a little smaller than the Newport 860A. Maybe stepper motors? Haven't arrived yet. I got a few for $40 each.