This is an old revision of the document!

Parallel polishing

Basically the following are of interest:

Allied High Tech
- Machine w/ jig
  - Ex: TechPrep system
  - Looks to be a good, compact option
Lapmaster
- Machine
  - Large for wafer polishing?
- Jig
  - Intended for wafer polishing
  - Ex: AccuPol
Logitech Ltd
- Looks to be the highest quality on the market
- Machine
  - With motorized arm, timing controls
  - Ex: LP50
- Jig
  - Precision three point
  - Ex: PP6
MTI Corporation
- Machine
  - With non-motorized arms
  - Ex: EQ-Unipol-802
- Jig
  - Standard parallel fixture
  - Ex: EQ-PF-4-1V
South Bay Technology
- Machine
  - With motorized arm
- Jig
  - Many options
  - Simple three point
Ultratec
- Machine
  - Ex: ULTRAPOL Advance

Other:

References