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equipment:rie:start

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Desktop machines:

  • Harrick: Looks like an entry level desktop unit
  • Diener Zepto
  • March Plasmod
  • Electron Microscopy Sciences: EMS 1050
  • C102370 Plasmatic Systems Plasma-Preen II 862 Plasma Cleaning & Etching System

Smallish 13.56 MHz RF supplies:

  • March Plasmod Plasma Asher/Etcher, MPS 300 RF Generator
  • Seren R601 600W RF Generator Plasma Power Supply 9600610003 13.56MHz March
  • Nordson MARCH PM-600 Barrel Plasma Etcher
  • March Plasma Etcher Component
  • keywords
    • (plasma, rf, hf) (amp, amplifier, generator)

Medium machines:

  • Plasma-Therm Model 70
  • TECHNICS MACRO 8800
  • Axic MultiMode HF-8
  • TECHNICS PLASMA GmbH PVA TEPLA 100-E
  • TOK OPMA 1250
  • TOK OPM-1250ALBM
  • OptiGlow ACE
  • TEPLA AUTOLOAD 300
  • Branson IPC 2000 3000 4000

Floor model:

  • MetroLine / IPC 7102 Barrel Plasma
  • Gasonic 2000LL
  • Drytek MegaStrip6
  • Matrix 10 Plasma
  • Gasonics Aura 1000 (1008)
  • Matrix 105 Plasma Asher Descum
equipment/rie/start.1374290903.txt.gz ยท Last modified: 2013/10/20 14:59 (external edit)