This is an old revision of the document!
* keywords
(plasma, rf, hf) (amp, amplifier, generator, etcher)
Desktop machines:
Harrick: Looks like an entry level desktop unit
Diener Zepto
March Plasmod
Electron Microscopy Sciences: EMS 1050
C102370 Plasmatic Systems Plasma-Preen II 862 Plasma Cleaning & Etching System
Smallish 13.56 MHz RF supplies:
March Plasmod Plasma Asher/Etcher, MPS 300 RF Generator
Seren R601 600W RF Generator Plasma Power Supply 9600610003 13.56MHz March
Nordson MARCH PM-600 Barrel Plasma Etcher
March Plasma Etcher Component
Adtec AX-2000III 2000W RF Plasma Generator 13.56MHz
Medium machines:
Floor model:
MetroLine / IPC 7102 Barrel Plasma
Gasonic 2000LL
Drytek MegaStrip6
Matrix 10 Plasma
Gasonics Aura 1000 (1008)
Matrix 105 Plasma Asher Descum