equipment:rie:start
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* keywords
- (plasma, rf, hf) (amp, amplifier, generator, etcher)
Desktop machines:
- Harrick: Looks like an entry level desktop unit
- Diener Zepto
- March Plasmod
- Electron Microscopy Sciences: EMS 1050
- C102370 Plasmatic Systems Plasma-Preen II 862 Plasma Cleaning & Etching System
Smallish 13.56 MHz RF supplies:
- March Plasmod Plasma Asher/Etcher, MPS 300 RF Generator
- Seren R601 600W RF Generator Plasma Power Supply 9600610003 13.56MHz March
- Nordson MARCH PM-600 Barrel Plasma Etcher
- March Plasma Etcher Component
- Adtec AX-2000III 2000W RF Plasma Generator 13.56MHz
Medium machines:
- Plasma-Therm Model 70
- TECHNICS MACRO 8800
- Axic MultiMode HF-8
- TECHNICS PLASMA GmbH PVA TEPLA 100-E
- TOK OPMA 1250
- TOK OPM-1250ALBM
- OptiGlow ACE
- TEPLA AUTOLOAD 300
- Branson IPC 2000 3000 4000
Floor model:
- MetroLine / IPC 7102 Barrel Plasma
- Gasonic 2000LL
- Drytek MegaStrip6
- Matrix 10 Plasma
- Gasonics Aura 1000 (1008)
- Matrix 105 Plasma Asher Descum
equipment/rie/start.1374291109.txt.gz ยท Last modified: 2013/10/20 14:59 (external edit)