Silicon Prawn

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* keywords

• (plasma, rf, hf) (amp, amplifier, generator, etcher)

Desktop machines:

• Diener Zepto: seems to be a lower cost desktop system. Overall unit looks nice for small prep work
  • Thierry Zepto Low Pressure Plasma System
  • 40 kHz (compare with 13.56 MHz)
  • 2 Needle Valves
  • Manual Control (compare with automatic)
  • Borosilicate Glass Chamber (compare with quartz chamber)
• SPI SUPPLIES Plasma Prep Plasma Etcher Plasma Asher Plasma Cleaner
  • Very basic but looks like it should be functional
  • Adjustable RF power to 100W
  • Has an RF tuning knob…frequency range?
• ANTON PAAR CPA-1 COOL PLASMA ASHER
  • Quartz chamber
  • Looks like a nice unit
  • Intended for biotech composition analysis (“digestion”). How hard would it be to re-purpose?
• Harrick: Looks like an entry level desktop unit
• Electron Microscopy Sciences: EMS 1050

Table sized machines:

• Nordson MARCH PM-600 Barrel Plasma Etcher: looks to be a nice unit although much larger than some tabletop units
• Plasmatic Systems Plasma-Preen II 862 Plasma Cleaning & Etching System
  • Looks like a super industrial kitchen microwave
  • Looks like it has some nice features like maybe better gas diffusion (“show head” type)

Smallish 13.56 MHz RF supplies:

• March Plasmod Plasma Asher/Etcher, MPS 300 RF Generator
• Seren R601 600W RF Generator Plasma Power Supply 9600610003 13.56MHz March
• Nordson MARCH PM-600 Barrel Plasma Etcher
• March Plasma Etcher Component
• Adtec AX-2000III 2000W RF Plasma Generator 13.56MHz

Medium machines:

• Plasma-Therm Model 70
• TECHNICS MACRO 8800
• Axic MultiMode HF-8
• TECHNICS PLASMA GmbH PVA TEPLA 100-E
• TOK OPMA 1250
• TOK OPM-1250ALBM
• OptiGlow ACE
• TEPLA AUTOLOAD 300
• Branson IPC 2000 3000 4000

Floor model:

• MetroLine / IPC 7102 Barrel Plasma
• Gasonic 2000LL
• Drytek MegaStrip6
• Matrix 10 Plasma
• Gasonics Aura 1000 (1008)
• Matrix 105 Plasma Asher Descum