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| equipment:rie:start [2013/07/18 06:13] – mcmaster | equipment:rie:start [2014/11/14 16:46] – mcmaster | ||
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| + | Keywords | ||
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| + | * (plasma, rf, hf) (amp, amplifier, generator, etcher) | ||
| + | |||
| + | |||
| + | ====== Planar ====== | ||
| + | |||
| + | Ion beam etching machines are essentially planar RIE machines without a process gas? Should be easily convertable to RIE machine. | ||
| + | |||
| + | |||
| + | ====== Barrel ====== | ||
| + | |||
| + | |||
| + | ====== Unsorted ====== | ||
| + | |||
| Desktop machines: | Desktop machines: | ||
| - | | + | |
| - | * Diener Zepto | + | |
| - | * March Plasmod | + | * Type: barrel |
| - | * Electron Microscopy Sciences: EMS 1050 | + | * Thierry Zepto Low Pressure Plasma System |
| + | * 40 kHz (compare with 13.56 MHz) | ||
| + | * 2 Needle Valves | ||
| + | * Manual Control (compare with automatic) | ||
| + | * Borosilicate Glass Chamber (compare with quartz chamber) \\ | ||
| + | * mne: I had a phone call with a Diener | ||
| + | * SPI SUPPLIES Plasma Prep Plasma Etcher Plasma Asher Plasma Cleaner | ||
| + | * Very basic but looks like it should be functional | ||
| + | * Adjustable RF power to 100W | ||
| + | * Has an RF tuning knob…frequency range? | ||
| + | * ANTON PAAR CPA-1 COOL PLASMA ASHER | ||
| + | * Quartz chamber | ||
| + | * Looks like a nice unit | ||
| + | * Intended for biotech composition analysis (" | ||
| + | * Harrick: Looks like an entry level desktop unit | ||
| + | | ||
| + | |||
| + | Table sized machines: | ||
| + | |||
| + | * Nordson MARCH PM-600 Barrel Plasma Etcher: looks to be a nice unit although much larger than some tabletop units | ||
| + | * Plasmatic Systems Plasma-Preen II 862 Plasma Cleaning & Etching System | ||
| + | * Looks like a super industrial kitchen microwave | ||
| + | * Looks like it has some nice features like maybe better gas diffusion ("show head" type) | ||
| + | * Technics PEII A, Table Top Asher/Desum System | ||
| + | * Type: parallel plate | ||
| + | * 11" parallel plate | ||
| Smallish 13.56 MHz RF supplies: | Smallish 13.56 MHz RF supplies: | ||
| - | | + | |
| - | * Seren R601 600W RF Generator Plasma Power Supply 9600610003 13.56MHz March | + | |
| - | * Nordson MARCH PM-600 Barrel Plasma Etcher | + | * Seren R601 600W RF Generator Plasma Power Supply 9600610003 13.56MHz March |
| - | * March Plasma Etcher Component | + | * Nordson MARCH PM-600 Barrel Plasma Etcher |
| + | * March Plasma Etcher Component | ||
| + | * Adtec AX-2000III 2000W RF Plasma Generator 13.56MHz | ||
| Medium machines: | Medium machines: | ||
| - | | + | |
| - | * TECHNICS MACRO 8800 | + | |
| - | * Axic MultiMode HF-8 | + | * TECHNICS MACRO 8800 |
| - | * TECHNICS PLASMA GmbH PVA TEPLA 100-E | + | * Axic MultiMode HF-8 |
| - | * TOK OPMA 1250 | + | * TECHNICS PLASMA GmbH PVA TEPLA 100-E |
| - | * TOK OPM-1250ALBM | + | * TOK OPMA 1250 |
| - | * OptiGlow ACE | + | * TOK OPM-1250ALBM |
| - | * TEPLA AUTOLOAD 300 | + | * OptiGlow ACE |
| - | * Branson IPC 2000 3000 4000 | + | * TEPLA AUTOLOAD 300 |
| - | + | * Branson IPC 2000 3000 4000 | |
| Floor model: | Floor model: | ||
| - | | + | |
| - | * Gasonic 2000LL | + | |
| - | * Drytek MegaStrip6 | + | * Gasonic 2000LL |
| - | * Matrix 10 Plasma | + | * Drytek MegaStrip6 |
| - | * Gasonics Aura 1000 (1008) | + | * Matrix 10 Plasma |
| - | * Matrix 105 Plasma Asher Descum | + | * Gasonics Aura 1000 (1008) |
| + | * Matrix 105 Plasma Asher Descum | ||
| + | |||
| + | ====== Plasmaline ====== | ||
| + | |||
| + | {{: | ||