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| equipment:rie:start [2013/10/26 14:33] – mcmaster | equipment:rie:start [2014/11/14 16:46] – mcmaster | ||
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| - | * keywords | + | |
| - | * (plasma, rf, hf) (amp, amplifier, generator, etcher) | + | Keywords |
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| + | ====== Planar ====== | ||
| + | |||
| + | Ion beam etching machines are essentially planar RIE machines without a process gas? Should be easily convertable to RIE machine. | ||
| + | |||
| + | |||
| + | ====== Barrel ====== | ||
| + | |||
| + | |||
| + | ====== Unsorted ====== | ||
| Desktop machines: | Desktop machines: | ||
| - | | + | |
| - | * Type: barrel | + | |
| - | * Thierry Zepto Low Pressure Plasma System | + | * Type: barrel |
| - | * 40 kHz (compare with 13.56 MHz) | + | * Thierry Zepto Low Pressure Plasma System |
| - | * 2 Needle Valves | + | * 40 kHz (compare with 13.56 MHz) |
| - | * Manual Control (compare with automatic) | + | * 2 Needle Valves |
| - | * Borosilicate Glass Chamber (compare with quartz chamber) | + | * Manual Control (compare with automatic) |
| - | * SPI SUPPLIES Plasma Prep Plasma Etcher Plasma Asher Plasma Cleaner | + | * Borosilicate Glass Chamber (compare with quartz chamber) |
| - | * Very basic but looks like it should be functional | + | * mne: I had a phone call with a Diener tech: The Zepto is a barrel etcher, so it won't be useful for anisotropic IC RIE etching. The lowest cost system they have for corrosive RIE etching is the13.56MHz FEMTO Series. The price (including an active charcoal exhaust scrubber but without any fancy device control and backing pump) is approx. EUR 15k. \\ |
| - | * Adjustable RF power to 100W | + | |
| - | * Has an RF tuning knob...frequency range? | + | * Very basic but looks like it should be functional |
| - | * ANTON PAAR CPA-1 COOL PLASMA ASHER | + | * Adjustable RF power to 100W |
| - | * Quartz chamber | + | * Has an RF tuning knob…frequency range? |
| - | * Looks like a nice unit | + | * ANTON PAAR CPA-1 COOL PLASMA ASHER |
| - | * Intended for biotech composition analysis (" | + | * Quartz chamber |
| - | * Harrick: Looks like an entry level desktop unit | + | * Looks like a nice unit |
| - | * Electron Microscopy Sciences: EMS 1050 | + | * Intended for biotech composition analysis (" |
| + | * Harrick: Looks like an entry level desktop unit | ||
| + | * Electron Microscopy Sciences: EMS 1050 | ||
| Table sized machines: | Table sized machines: | ||
| - | * Nordson MARCH PM-600 Barrel Plasma Etcher: looks to be a nice unit although much larger than some tabletop units | ||
| - | * Plasmatic Systems Plasma-Preen II 862 Plasma Cleaning & Etching System | ||
| - | * Looks like a super industrial kitchen microwave | ||
| - | * Looks like it has some nice features like maybe better gas diffusion ("show head" type) | ||
| - | * Technics PEII A, Table Top Asher/Desum System | ||
| - | * Type: parallel plate | ||
| - | * 11" parallel plate | ||
| + | * Nordson MARCH PM-600 Barrel Plasma Etcher: looks to be a nice unit although much larger than some tabletop units | ||
| + | * Plasmatic Systems Plasma-Preen II 862 Plasma Cleaning & Etching System | ||
| + | * Looks like a super industrial kitchen microwave | ||
| + | * Looks like it has some nice features like maybe better gas diffusion ("show head" type) | ||
| + | * Technics PEII A, Table Top Asher/Desum System | ||
| + | * Type: parallel plate | ||
| + | * 11" parallel plate | ||
| Smallish 13.56 MHz RF supplies: | Smallish 13.56 MHz RF supplies: | ||
| - | | + | |
| - | * Seren R601 600W RF Generator Plasma Power Supply 9600610003 13.56MHz March | + | |
| - | * Nordson MARCH PM-600 Barrel Plasma Etcher | + | * Seren R601 600W RF Generator Plasma Power Supply 9600610003 13.56MHz March |
| - | * March Plasma Etcher Component | + | * Nordson MARCH PM-600 Barrel Plasma Etcher |
| - | * Adtec AX-2000III 2000W RF Plasma Generator 13.56MHz | + | * March Plasma Etcher Component |
| - | + | * Adtec AX-2000III 2000W RF Plasma Generator 13.56MHz | |
| Medium machines: | Medium machines: | ||
| - | | + | |
| - | * TECHNICS MACRO 8800 | + | |
| - | * Axic MultiMode HF-8 | + | * TECHNICS MACRO 8800 |
| - | * TECHNICS PLASMA GmbH PVA TEPLA 100-E | + | * Axic MultiMode HF-8 |
| - | * TOK OPMA 1250 | + | * TECHNICS PLASMA GmbH PVA TEPLA 100-E |
| - | * TOK OPM-1250ALBM | + | * TOK OPMA 1250 |
| - | * OptiGlow ACE | + | * TOK OPM-1250ALBM |
| - | * TEPLA AUTOLOAD 300 | + | * OptiGlow ACE |
| - | * Branson IPC 2000 3000 4000 | + | * TEPLA AUTOLOAD 300 |
| - | + | * Branson IPC 2000 3000 4000 | |
| Floor model: | Floor model: | ||
| - | * MetroLine / IPC 7102 Barrel Plasma | ||
| - | * Gasonic 2000LL | ||
| - | * Drytek MegaStrip6 | ||
| - | * Matrix 10 Plasma | ||
| - | * Gasonics Aura 1000 (1008) | ||
| - | * Matrix 105 Plasma Asher Descum | ||
| - | ====== Plasmaline ====== | + | * MetroLine / IPC 7102 Barrel Plasma |
| + | * Gasonic 2000LL | ||
| + | * Drytek MegaStrip6 | ||
| + | * Matrix 10 Plasma | ||
| + | * Gasonics Aura 1000 (1008) | ||
| + | * Matrix 105 Plasma Asher Descum | ||
| + | ====== Plasmaline ====== | ||
| + | {{: | ||