[[equipment:rie:start]]
 
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equipment:rie:start [2014/04/23 10:15] – mneequipment:rie:start [2014/11/14 16:46] – mcmaster
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-%%*%% keywords+ 
 +Keywords
  
     * (plasma, rf, hf) (amp, amplifier, generator, etcher)     * (plasma, rf, hf) (amp, amplifier, generator, etcher)
 +
 +
 +====== Planar ======
 +
 +Ion beam etching machines are essentially planar RIE machines without a process gas?  Should be easily convertable to RIE machine.
 +
 +
 +====== Barrel ======
 +
 +
 +====== Unsorted ======
  
 Desktop machines: Desktop machines:
 
 
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