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| equipment:rie:start [2013/07/24 04:53] – mcmaster | equipment:rie:start [2019/03/05 01:40] (current) – removed mcmaster | ||
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| - | * keywords | ||
| - | * (plasma, rf, hf) (amp, amplifier, generator, etcher) | ||
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| - | Desktop machines: | ||
| - | * Harrick: Looks like an entry level desktop unit | ||
| - | * Diener Zepto: seems to be a lower cost system | ||
| - | * Thierry Zepto Low Pressure Plasma System | ||
| - | * 40 kHz (compare with 13.56 MHz) | ||
| - | * 2 Needle Valves | ||
| - | * Manual Control (compare with automatic) | ||
| - | * Borosilicate Glass Chamber (compare with quartz chamber) | ||
| - | * March Plasmod | ||
| - | * Electron Microscopy Sciences: EMS 1050 | ||
| - | * C102370 Plasmatic Systems Plasma-Preen II 862 Plasma Cleaning & Etching System | ||
| - | * ANTON PAAR CPA-1 COOL PLASMA ASHER | ||
| - | * SPI SUPPLIES Plasma Prep Plasma Etcher Plasma Asher Plasma Cleaner | ||
| - | * Nordson MARCH PM-600 Barrel Plasma Etcher | ||
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| - | Smallish 13.56 MHz RF supplies: | ||
| - | * March Plasmod Plasma Asher/ | ||
| - | * Seren R601 600W RF Generator Plasma Power Supply 9600610003 13.56MHz March | ||
| - | * Nordson MARCH PM-600 Barrel Plasma Etcher | ||
| - | * March Plasma Etcher Component | ||
| - | * Adtec AX-2000III 2000W RF Plasma Generator 13.56MHz | ||
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| - | Medium machines: | ||
| - | * Plasma-Therm Model 70 | ||
| - | * TECHNICS MACRO 8800 | ||
| - | * Axic MultiMode HF-8 | ||
| - | * TECHNICS PLASMA GmbH PVA TEPLA 100-E | ||
| - | * TOK OPMA 1250 | ||
| - | * TOK OPM-1250ALBM | ||
| - | * OptiGlow ACE | ||
| - | * TEPLA AUTOLOAD 300 | ||
| - | * Branson IPC 2000 3000 4000 | ||
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| - | Floor model: | ||
| - | * MetroLine / IPC 7102 Barrel Plasma | ||
| - | * Gasonic 2000LL | ||
| - | * Drytek MegaStrip6 | ||
| - | * Matrix 10 Plasma | ||
| - | * Gasonics Aura 1000 (1008) | ||
| - | * Matrix 105 Plasma Asher Descum | ||