This shows you the differences between two versions of the page.
Both sides previous revisionPrevious revisionNext revision | Previous revisionNext revisionBoth sides next revision | ||
equipment:rie:start [2013/07/18 06:13] – mcmaster | equipment:rie:start [2014/11/14 16:45] – mcmaster | ||
---|---|---|---|
Line 1: | Line 1: | ||
+ | |||
+ | Keywords | ||
+ | |||
+ | * (plasma, rf, hf) (amp, amplifier, generator, etcher) | ||
+ | |||
+ | |||
+ | ====== Planar ====== | ||
+ | |||
+ | Ion beam etching machines should be trivially convertable to planar RIE machine | ||
+ | |||
+ | |||
+ | ====== Barrel ====== | ||
+ | |||
+ | |||
+ | ====== Unsorted ====== | ||
+ | |||
Desktop machines: | Desktop machines: | ||
- | | + | |
- | * Diener Zepto | + | |
- | * March Plasmod | + | * Type: barrel |
- | * Electron Microscopy Sciences: EMS 1050 | + | * Thierry Zepto Low Pressure Plasma System |
+ | * 40 kHz (compare with 13.56 MHz) | ||
+ | * 2 Needle Valves | ||
+ | * Manual Control (compare with automatic) | ||
+ | * Borosilicate Glass Chamber (compare with quartz chamber) \\ | ||
+ | * mne: I had a phone call with a Diener | ||
+ | * SPI SUPPLIES Plasma Prep Plasma Etcher Plasma Asher Plasma Cleaner | ||
+ | * Very basic but looks like it should be functional | ||
+ | * Adjustable RF power to 100W | ||
+ | * Has an RF tuning knob…frequency range? | ||
+ | * ANTON PAAR CPA-1 COOL PLASMA ASHER | ||
+ | * Quartz chamber | ||
+ | * Looks like a nice unit | ||
+ | * Intended for biotech composition analysis (" | ||
+ | * Harrick: Looks like an entry level desktop unit | ||
+ | | ||
+ | |||
+ | Table sized machines: | ||
+ | |||
+ | * Nordson MARCH PM-600 Barrel Plasma Etcher: looks to be a nice unit although much larger than some tabletop units | ||
+ | * Plasmatic Systems Plasma-Preen II 862 Plasma Cleaning & Etching System | ||
+ | * Looks like a super industrial kitchen microwave | ||
+ | * Looks like it has some nice features like maybe better gas diffusion ("show head" type) | ||
+ | * Technics PEII A, Table Top Asher/Desum System | ||
+ | * Type: parallel plate | ||
+ | * 11" parallel plate | ||
Smallish 13.56 MHz RF supplies: | Smallish 13.56 MHz RF supplies: | ||
- | | + | |
- | * Seren R601 600W RF Generator Plasma Power Supply 9600610003 13.56MHz March | + | |
- | * Nordson MARCH PM-600 Barrel Plasma Etcher | + | * Seren R601 600W RF Generator Plasma Power Supply 9600610003 13.56MHz March |
- | * March Plasma Etcher Component | + | * Nordson MARCH PM-600 Barrel Plasma Etcher |
+ | * March Plasma Etcher Component | ||
+ | * Adtec AX-2000III 2000W RF Plasma Generator 13.56MHz | ||
Medium machines: | Medium machines: | ||
- | | + | |
- | * TECHNICS MACRO 8800 | + | |
- | * Axic MultiMode HF-8 | + | * TECHNICS MACRO 8800 |
- | * TECHNICS PLASMA GmbH PVA TEPLA 100-E | + | * Axic MultiMode HF-8 |
- | * TOK OPMA 1250 | + | * TECHNICS PLASMA GmbH PVA TEPLA 100-E |
- | * TOK OPM-1250ALBM | + | * TOK OPMA 1250 |
- | * OptiGlow ACE | + | * TOK OPM-1250ALBM |
- | * TEPLA AUTOLOAD 300 | + | * OptiGlow ACE |
- | * Branson IPC 2000 3000 4000 | + | * TEPLA AUTOLOAD 300 |
- | + | * Branson IPC 2000 3000 4000 | |
Floor model: | Floor model: | ||
- | | + | |
- | * Gasonic 2000LL | + | |
- | * Drytek MegaStrip6 | + | * Gasonic 2000LL |
- | * Matrix 10 Plasma | + | * Drytek MegaStrip6 |
- | * Gasonics Aura 1000 (1008) | + | * Matrix 10 Plasma |
- | * Matrix 105 Plasma Asher Descum | + | * Gasonics Aura 1000 (1008) |
+ | * Matrix 105 Plasma Asher Descum | ||
+ | |||
+ | ====== Plasmaline ====== | ||
+ | |||
+ | {{: | ||