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Keywords
(plasma, rf, hf) (amp, amplifier, generator, etcher)
Planar
Ion beam etching machines should be trivially convertable to planar RIE machine
Barrel
Unsorted
Desktop machines:
Diener Zepto: seems to be a lower cost desktop system. Overall unit looks nice for small prep work
Type: barrel
Thierry Zepto Low Pressure Plasma System
40 kHz (compare with 13.56
MHz)
2 Needle Valves
Manual Control (compare with automatic)
Borosilicate Glass Chamber (compare with quartz chamber)
mne: I had a phone call with a Diener tech: The Zepto is a barrel etcher, so it won't be useful for anisotropic IC RIE etching. The lowest cost system they have for corrosive RIE etching is the13.56MHz FEMTO Series. The price (including an active charcoal exhaust scrubber but without any fancy device control and backing pump) is approx. EUR 15k.
SPI SUPPLIES Plasma Prep Plasma Etcher Plasma Asher Plasma Cleaner
Very basic but looks like it should be functional
Adjustable RF power to 100W
Has an RF tuning knob…frequency range?
ANTON PAAR CPA-1 COOL PLASMA ASHER
Harrick: Looks like an entry level desktop unit
Electron Microscopy Sciences: EMS 1050
Table sized machines:
Nordson MARCH PM-600 Barrel Plasma Etcher: looks to be a nice unit although much larger than some tabletop units
Plasmatic Systems Plasma-Preen II 862 Plasma Cleaning & Etching System
Technics PEII A, Table Top Asher/Desum System
Type: parallel plate
11“ parallel plate
Smallish 13.56 MHz RF supplies:
March Plasmod Plasma Asher/Etcher, MPS 300 RF Generator
Seren R601 600W RF Generator Plasma Power Supply 9600610003 13.56MHz March
Nordson MARCH PM-600 Barrel Plasma Etcher
March Plasma Etcher Component
Adtec AX-2000III 2000W RF Plasma Generator 13.56MHz
Medium machines:
Floor model:
MetroLine / IPC 7102 Barrel Plasma
Gasonic 2000LL
Drytek MegaStrip6
Matrix 10 Plasma
Gasonics Aura 1000 (1008)
Matrix 105 Plasma Asher Descum
Plasmaline