[[equipment:rie:start]]
 
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equipment:rie:start [2014/11/14 16:45] – mcmasterequipment:rie:start [2014/11/14 16:46] – mcmaster
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 ====== Planar ====== ====== Planar ======
  
-Ion beam etching machines should be trivially convertable to planar RIE machine+Ion beam etching machines are essentially planar RIE machines without a process gas?  Should be easily convertable to RIE machine.
  
  
 
 
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