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* keywords
(plasma, rf, hf) (amp, amplifier, generator, etcher)
Desktop machines:
Diener Zepto: seems to be a lower cost desktop system. Overall unit looks nice for small prep work
Thierry Zepto Low Pressure Plasma System
40 kHz (compare with 13.56
MHz)
2 Needle Valves
Manual Control (compare with automatic)
Borosilicate Glass Chamber (compare with quartz chamber)
ANTON PAAR CPA-1 COOL PLASMA ASHER
Harrick: Looks like an entry level desktop unit
Electron Microscopy Sciences: EMS 1050
SPI SUPPLIES Plasma Prep Plasma Etcher Plasma Asher Plasma Cleaner
Table sized machines:
Smallish 13.56 MHz RF supplies:
March Plasmod Plasma Asher/Etcher, MPS 300 RF Generator
Seren R601 600W RF Generator Plasma Power Supply 9600610003 13.56MHz March
Nordson MARCH PM-600 Barrel Plasma Etcher
March Plasma Etcher Component
Adtec AX-2000III 2000W RF Plasma Generator 13.56MHz
Medium machines:
Floor model:
MetroLine / IPC 7102 Barrel Plasma
Gasonic 2000LL
Drytek MegaStrip6
Matrix 10 Plasma
Gasonics Aura 1000 (1008)
Matrix 105 Plasma Asher Descum