Setup

• Pt electrode
  • Can substitute for something more common for RE purposes?
• 5 % HF or 5 % NH4F
• Keep 1 - 5 cm between Si and electrode

Procedure

• Apply positive voltage to Si

Notes

• Heavier doped areas are removed quicker
• No oxidizer required (ie light or HNO3)
• Good at emphasizing various Si doping
• Much safer than wet chemical alternatives

References